Research Laboratories

Thin Film Processing

  • AJA International ATC-1500 Sputtering chamber
  • Base pressure <10-7 Torr
  • 4 2" magnetron sputtering sources
  • In-situ annealing and RF bias
  • Load lock for rapid sample exchange
  • k-Space, Inc. Multi-Optic System (MOS) for in-site stress measurement
  • k-Space, Inc. BandiT for wafer and film temperature measurement
  • Quartz Crystal Thickness Monitor



  • AJA International Orion Sputtering Chamber
  • Base pressure <10-7 Torr
  • 3 2" magnetron sputtering sources
  • In-situ annealing 
  • Load lock for rapid sample exchange
  • Quartz Crystal Thickness Monitor

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  • Adixen ASM 340 Helium Leak Detector
AJA Sputtering tool
AJA ATC 1500
Picture
AJA Orion

Annealing Laboratory

  • Laboratory furnace (Tmax 1000 deg C) 
  • MTI Tube Furnace (Tmax 1100 deg C)
  • Lindberg Blue Mini Furnace (Tmax 1100 deg C)
  • Lindberg Blue Tube Furnace (Tmax 1200 deg C)
  • SentroTech tube furnace (Tmax 1700 deg C)
Various tube furnances
Various tube furnances

Inert Atmosphere Capabilities 

  • MBraun UNIlab Pro Glovebox Workstation
  • Quartz tubing vacuum encapsulation 
Picture
MBraun Glovebox

Hot Isostatic Press

  • American Isostatic Press 30H
  • Temperature max 2000 deg C
  • Pressure max 30 KSI
Picture
AIP 30H HIP

Specimen Preparatory Laboratory

  • TEM preparation equipment:
    • Gatan 601 disk grinder
    • Gatan Precison Ion Polishing Mill
    • Fischione Ultrasonic drill
    • Fischione dimpler
  • Ultrasonic bath
  • MTI Diamond Wire Saw
  • Buehler Autopolisher
  • Buehler Mounting Press
  • Buehler VibroMet 
  • Buehler IsoMet 4000 Precision saw
  • Struers Minitom
  • Disco D6 dicing saw
  • Electro-polishing unit for atom probe preparation
  • Nikon Optiphot M
Specimen preparation equipment
Specimen preparation equipment

Electromagnetic Mechanical Apparatus (EMMA)

  • System for mechanically testing materials at ultra high temperatures
  • Using the concept of the Lorentz Force, specimens can be subjected to a mechanical load using the concentrated magnetic field generated by an electromagnet and the current flowing through the specimen and heating it up resistively via a clamp, motor driven, pressure sensitive stage.
  • Laser profile displacement
  • Pyrometer up to 3000 deg C
  • Environmental control/vacuum system
  • Labview automation
ElectroMagnetic Mechanical Apparatus AKA EMMA version 3.0
ElectroMagnetic Mechanical Apparatus AKA EMMA version 3.0

UA's Central Analytical Facility (CAF)

  • Professor Thompson’s research group members are active users of UA’s Central Analytical Facility. Professor Thompson was the Principle Investigator for a team of faculty members for the FEI Tecnai F20 Supertwin TEM (NSF-DMR-0421376) and laser attachment to the Imago Scientific Instruments Local Electrode Atom Probe, LEAP (NSF-DMR-0722631) housed in the CAF.

    Professor Thompson is a member of the CAF external faculty board and has been part of faulty teams leading institutional infrastructure investments, such as the base-LEAP instrument and the FEI Quanta 3D dual electron and focus ion beam (FIB) instrument, at UA.
  • CAF Lab Video
Various characterization equipment available at the CAF.
Various characterization equipment available at the CAF.